The Resource On-chip actuation of compliant bistable micro-mechanisms, by Michael S. Baker

On-chip actuation of compliant bistable micro-mechanisms, by Michael S. Baker

Label
On-chip actuation of compliant bistable micro-mechanisms
Title
On-chip actuation of compliant bistable micro-mechanisms
Statement of responsibility
by Michael S. Baker
Creator
Subject
Genre
Language
eng
Summary
Two compliant bistable micro-mechanisms have been developed which can be switched in either direction using on-chip thermal actuation. The energy storage and bistable behavior of the mechanisms are achieved through the elastic deflection of compliant segments. The pseudo-rigid-body model was used for the compliant mechanism design, and for analysis of the large-deflection flexible segments. To achieve on-chip actuation, the mechanism designs were optimized to reduce their required rotation, allow them to be switched using linear-motion thermal actuators. The modeling theory and analysis are presented for several design iterations. Each iteration was successfully fabricated and tested using either the MUMPs or SUMMiT surface micromachining technology
Cataloging source
UPB
Degree
M.S.
Dissertation year
2002
Granting institution
Brigham Young University. Dept. of Mechanical Engineering
Illustrations
illustrations
Index
no index present
Literary form
non fiction
Nature of contents
bibliography
Label
On-chip actuation of compliant bistable micro-mechanisms, by Michael S. Baker
Link
http://hdl.lib.byu.edu/1877/etd169
Instantiates
Publication
Bibliography note
Includes bibliographical references (p. 75-80)
Carrier category
volume
Carrier MARC source
rdacarrier
Content category
text
Content type MARC source
rdacontent
Dimensions
28 cm.
Extent
i, 86 p.
Media category
unmediated
Media MARC source
rdamedia
Other physical details
ill.
System control number
(OCoLC)ocn370549064
Label
On-chip actuation of compliant bistable micro-mechanisms, by Michael S. Baker
Link
http://hdl.lib.byu.edu/1877/etd169
Publication
Bibliography note
Includes bibliographical references (p. 75-80)
Carrier category
volume
Carrier MARC source
rdacarrier
Content category
text
Content type MARC source
rdacontent
Dimensions
28 cm.
Extent
i, 86 p.
Media category
unmediated
Media MARC source
rdamedia
Other physical details
ill.
System control number
(OCoLC)ocn370549064

Library Locations

    • BYU-INTERNETBorrow it
      UT, US
    • Harold B. Lee Library Brigham Young University, Provo, UT, 84602, US
      40.249156 -111.649242
    • BYU-SPECIAL-COLLECTIONSBorrow it
      UT, US
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