Coverart for item
The Resource Physics of radio-frequency plasmas, Pascal Chabert, Nicholas Braithwaite

Physics of radio-frequency plasmas, Pascal Chabert, Nicholas Braithwaite

Label
Physics of radio-frequency plasmas
Title
Physics of radio-frequency plasmas
Statement of responsibility
Pascal Chabert, Nicholas Braithwaite
Creator
Contributor
Subject
Genre
Language
eng
Cataloging source
NhCcYBP
Dewey number
621.044
Illustrations
illustrations
Index
index present
LC call number
TA2020
LC item number
.C43 2011
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
Label
Physics of radio-frequency plasmas, Pascal Chabert, Nicholas Braithwaite
Link
http://site.ebrary.com/lib/byuprovo/Doc?id=10449549
Instantiates
Publication
Note
Description based on print version record
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier MARC source
rdacarrier
Content category
text
Content type MARC source
rdacontent
Contents
Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index
Dimensions
unknown
Extent
1 online resource.
Form of item
electronic
Isbn
9780511859274
Isbn Type
(electronic bk.)
Media category
computer
Media MARC source
rdamedia
Reproduction note
Electronic reproduction.
Specific material designation
remote
System control number
  • (Sirsi) y40019231935
  • UtOrBLW
  • (OCoLC)ocn722415325
Label
Physics of radio-frequency plasmas, Pascal Chabert, Nicholas Braithwaite
Link
http://site.ebrary.com/lib/byuprovo/Doc?id=10449549
Publication
Note
Description based on print version record
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier MARC source
rdacarrier
Content category
text
Content type MARC source
rdacontent
Contents
Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index
Dimensions
unknown
Extent
1 online resource.
Form of item
electronic
Isbn
9780511859274
Isbn Type
(electronic bk.)
Media category
computer
Media MARC source
rdamedia
Reproduction note
Electronic reproduction.
Specific material designation
remote
System control number
  • (Sirsi) y40019231935
  • UtOrBLW
  • (OCoLC)ocn722415325

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